Abstract: The mechanical characteristic parameters of hard coating material TiZrN was identified based on vibration beam method. Firstly, the measurement principle and the testing process of the vibration beam method were introduced. Then, the testing system was built to identify the mechanical characteristic parameters of the hard coating materials. The mechanical characteristic parameters of the hard coating material TiZrN were measured, and the intrinsic frequencies and loss factors of the bending modals of the corresponding structural coatings were obtained. Furthermore, the elastic modulus and loss factor of hard coating material TiZrN were estimated. Finally, the possible errors of the system were analyzed. Based on the identification formula of the vibration beam method, and the sensitivity of the identification results to the material parameters was described.

Key words: vibration and wave , vibration beam method , hard coat , elastic modulus , dissipation factor

摘要： 采用振动梁法对硬涂层材料TiZrN的机械特性参数进行辨识测试。首先详细叙述振动梁法辨识涂层材料参数的原理性公式，并在此基础上搭建基于振动梁法的硬涂层材料机械特性参数实验系统。根据此测试系统，对硬涂层材料TiZrN的力学特性参数进行测试研究，获得对应结构涂层前后前3阶弯曲模态的固有频率和损耗因子，进而辨识出TiZrN的弹性模量和损耗因子。最后，对可能产生的参数识别误差进行分析，并结合振动梁法辨识公式，分析各输入参数对硬涂层材料力学参数识别结果的敏感性。

关键词: 振动与波, 振动梁法, 硬涂层, 弹性模量, 损耗因子