The mechanical characteristic parameters of hard coating material TiZrN was identified based on vibration beam method. Firstly, the measurement principle and the testing process of the vibration beam method were introduced. Then, the testing system was built to identify the mechanical characteristic parameters of the hard coating materials. The mechanical characteristic parameters of the hard coating material TiZrN were measured, and the intrinsic frequencies and loss factors of the bending modals of the corresponding structural coatings were obtained. Furthermore, the elastic modulus and loss factor of hard coating material TiZrN were estimated. Finally, the possible errors of the system were analyzed. Based on the identification formula of the vibration beam method, and the sensitivity of the identification results to the material parameters was described.